| 000 | 00360nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 150430s2007 xx 000 0 und d | ||
| 020 | _a9780198084808 | ||
| 100 | _aCampbell,S.A. | ||
| 245 | 4 | _aThe Science and Engineering of Microelectronic Fabrication | |
| 250 | _a2ed | ||
| 260 |
_aNew Delhi _bOxford University Press _c2007 |
||
| 300 | _a603 | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c915 _d915 |
||